Optical Metrology Platform Featuring Multisensor Technology

Mahr Inc. has launched its MarSurf3D MS optical metrology platform, featuring a multisensor measuring head designed to deliver flexibility and modularity with precision. The 3D optical platform enables manufacturers to customize and configure a single measurement system that meets their specific application requirements, eliminating the need to switch between instruments.

The MarSurf3D MS is capable of real-time measurements down to the sub-nanometer range with a flexible multisensor measuring head that combines three distinct area-based measuring technologies:

• LED confocal: The patented multipinhole technology enables fast image capture with high signal quality, offering increased repeatability down to the nanometer range on nearly any surface condition.
• White light interferometry: Offers vertical resolution in the sub-nanometer range regardless of magnification, making it suited for measurement of precise step heights and low roughness surfaces.
• Focus variation with active lighting: Developed specifically for measuring the geometry of large, rough surfaces, it allows steeply inclined surfaces (up to 86°) and large vertical ranges to be captured in a single measurement.

MarSurf3D MS technology is available with a wide variety of axes off-the-shelf, ranging from 50 x 50 x 35 mm XYZ on the MX3050 portable instrument, up to 500 x 400 x 100 mm XYZ axes on the GS3501. The MarSurf3D MS SX3200, which is on display at IMTS booth 134255, features a compact design with 200 x 75 mm XYZ axes. Built for versatility, this multifunctional tool can be used in laboratories, quality assurance environments, or directly on the production floor. It addresses a broad spectrum of manufacturing applications, including structured, rough, and smooth surfaces, steep flanks, layer thickness, and large height measuring ranges.

Key features of the MarSurf3D MS platform include:

• Measurements can be fully automated to increase throughput and reduce operator error.
• Offers material-independent measurement of any geometries and surface characteristics regardless of whether they are reflective, absorbent, opaque, or transparent.
• Simple, user-guided interface features automatic modes for all significant measuring parameters, including the use of measurement protocols for known surfaces.
• Enhanced precision, accuracy, repeatability, reproducibility, and documentation help ensure traceability and auditability.

"Historically, quality assurance and manufacturing operations had to compromise on surface inspection or invest in multiple costly, single-purpose instruments to handle different materials," said Dr. Christian Wichern, Ph.D., Product Manager at Mahr Inc. "The MarSurf3D MS platform changes that by combining three distinct, high-performance optical technologies into a multisensor system that brings speed, flexibility, and repeatability to 3D surface measurement."

For more information contact:

Mahr Inc.

1139 Eddy Street

Providence, RI 02905

401-784-3100

information@mahr.com

www.mahr.com

IMTS East Building, Level 3

Booth 134255