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Microscope Performs Non-Contact Profile and Roughness Measurement



The KEYENCE VK-X Series 3D Laser Scanning Microscope is intended to combine the capabilities of SEMs and non-contact roughness gauges with the simplicity of an optical microscope. Applications include evaluating and comparing surface finish and tool wear. This system features a 0.5 nanometer Z-axis resolution with a magnification range of 200x - 24,000x. The addition of the AI-Scan function allows users to image and measure a target with a click of the mouse.

"With high-resolution color imaging and nanometer-level profile measurement functions, the VK-X Series Laser Scanning Microscopes have been designed to overcome the inadequacies of conventional imaging and profiling technologies," said a company spokesperson. "A short wavelength laser scans across a target to provide non-contact profile, roughness and thickness measurements, even on targets with highly angular surfaces. By combining the laser with a 16-bit photomultiplier, the VK-X can obtain an image and measurement on nearly any type of material, as well as thickness measurements on transparent films and coatings."

In order to simplify the operation of the VK-X, the AI-Scan function was developed to automate the scanning process. Users can place their sample on the stage, and by clicking a single button, the system will automatically adjust the sensitivity, set limits of the scan range and re-scan the target as needed to make sure all information was captured. "By using this function, even inexperienced users can quickly and easily obtain accurate measurement data and high-resolution images," said the spokesperson.

Additional features reported by the company include a WIDE-Scan function that is 8x faster than conventional laser scanning microscopes that improves the quality of the captured image. A high-speed auto-focus algorithm has been incorporated into the system and images can be captured at up to 21.6 megapixels. All of the measurement functions from the previous VK Series product line have been extended to the VK-X, including the ability to measure the thickness or profile/roughness of transparent materials.

For more information contact:

Keyence Corporation of America

1100 N. Arlington Heights Rd., Ste. 350

Itasca, IL 60143

888-539-3623

www.keyence.com

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