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White Light Interferometer

Mahr Inc. offers the MarSurf WI, a white light interferometer, developed in cooperation with NanoFocus, that enables high-resolution 3D measurement and ease of use. The system features evaluation technology based on artificial intelligence (AI), which allows the highest accuracy to be achieved with increased robustness, according to the company. The system offers a resolution of down to 0.1 nm, making it suitable for use in the production of semiconductor devices or optical components, as well as automotive, aerospace, medical applications and more.

The MarSurf white light interferometer joins Mahr's family of surface finish measurement tools. These include the MarSurf contour drive (CD) series surface finish and contour measurement systems, MarSurf GD series for roughness measurements and the variable-drive MarSurf VD series, which enables roughness and contour measurements to be performed on the same machine.

"All MarSurf products provide unprecedented levels of speed, flexibility and intelligent ease of use. This enables users to improve the manufacturing quality of workpieces with faster throughput and higher accuracy for a wide variety of applications," said a company spokesperson.

The MarSurf WI uses the same MfM software interface for measurement and analysis as the existing MarSurf CM line of surface metrology instruments.

"MfM software for confocal microscopes and white light interferometers makes it easy to compare and select the best technology," said Manuel Hüsken, CEO of Mahr GmbH. "With the new white light interferometer product line, Mahr is consistently expanding its portfolio of 3D measuring instruments and positioning itself as a strong solution provider in metrology across technologies."

For more information contact:

Mahr Inc.

1139 Eddy Street

Providence, RI 02905


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