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Laser Power Sensor for Micromachining

MKS Instruments, Inc. offers the Ophir F150(200)A-CM-16 thermal sensor for measuring high repetition rate lasers with very short pulses in the nano, pico and femto second ranges.

"High repetition rate lasers can induce damage to conventional sensor coatings at lower power densities than is often required by users," said a company spokesperson. "The F150(200)A-CM-16 is a compact, calibrated, fan cooled sensor that supports high-rep very short pulse lasers with average power up to 200W. Such performance is typically only achieved with a diffuser. The new sensor accomplishes this without a diffuser, thus alleviating the problems related to contamination on the diffuser."

The F150(200)A-CM-16 sensor can withstand higher power densities and measure continuously average power up to 150 W and intermittently up to 200 W. This makes the sensor suited for use in material microprocessing such as semiconductor applications, PCB drilling, advanced flat panel display production, photovoltaic cells and medical applications.

"We are seeing an increase in output power for ultrashort pulse high repetition lasers in material microprocessing applications, even in challenging niches like UV with pico and femtosecond," said Reuven Silverman, General Manager, Ophir Photonics. "The new Ophir F150(200)A-CM-16 sensor allows measurement of up to 200 W with high sensitivity. This means the sensor can notice very small changes in laser power-exactly what is needed for the precise laser control required by micromachining applications."

The Ophir F150(200)A-CM-16 sensor is a new addition to the Ophir line of sensors targeting micro materials processing, which includes the F80(120)A-CM-17, 30(150)A-SV-17 and more

"The F150(200)A-CM-16 sensor can withstand higher power densities for high repetition rate pulsed lasers than sensors with conventional coatings," said the spokesperson. The new sensor works with industrial lasers at wavelengths from 248 nm to 9.4 µm. It measures laser power from 100 mW to 150 W continuously (up to 200 W intermittently). The sensor is fan-cooled with a 16 mm aperture. It features an absorber that will not be damaged by the ablation usually caused by very short pulses, and it can withstand high power densities.

Like all Ophir sensors, the Ophir F150(200)A-CM-16 sensor includes a Smart Connector interface that works with the company's Centauri, StarBright, Vega, Nova II and StarLitesmart displays, Juno and Juno+ compact USB PC interface and EA-1 Ethernet adapter.

Data can be displayed in a variety of formats, including Digital with Bargraph, Line Plot, Pulse Chart and Real Time Statistics. The displays also feature sophisticated logging of power and energy, statistics, histograms and more, as well as advanced math functions. Each display is automatically configured and calibrated when plugged into one of the company's laser measurement heads.

For more information contact:

Ophir Business Unit (U.S.)

3050 North 300 West

North Logan, UT 84341


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