Enhanced Measurement Speed for Precision Inspection
March 1, 2025
Nikon Corporation has launched the NEXIV VMF-K Series, a next-generation video measuring system designed to meet the increasing semiconductor and electronic component inspection demands.
Building upon the success of the VMZ-K Series, the NEXIV VMF-K Series offers benefits to a wide range of industries in addition to semiconductor manufacturing, including advanced packaging, substrate production, wafer inspection and probe card inspection.
As semiconductors become smaller and more integrated, inspection processes are increasingly crucial for quality maintenance. The NEXIV VMF-K Series addresses this challenge by providing stable measurements of micron-level dimensions while improving throughput, thereby supporting stringent quality control in semiconductor device manufacturing.
The NEXIV VMF-K Series consists of the VMF-K3040, which replaces the VMZ-K3040, and the VMF-K6555, which replaces the VMZ-K6555.
Key benefits of the NEXIV VMF-K Series include:
- Enhanced measurement throughput: The VMF-K Series achieves 1.5x higher measurement throughput compared to the previous VMZ-K model (according to Nikon's standard measuring conditions), reducing measurement time and boosting productivity.
- Advanced optics: Equipped with a confocal optical system, the VMF-K Series enables simultaneous 2D and height measurement within the field of view, achieving higher throughput compared to height measurement using only bright-field images, the company reported.
- Improved light source: The confocal light source has been changed from a xenon lamp to an LED, increasing lifespan from 3,000 hours to 30,000 hours. This enhancement improves operational efficiency and reduces the need for lamp replacements.
- Expanded model lineup: The series now includes a standardized 45x objective lens model, supporting advanced semiconductor measurement demands for even finer measurements.
- SEMI S2/S8 compliance: The VMF-K Series meets industry safety standards for semiconductor manufacturing equipment when installed appropriately according to the SEMI S2/S8 guidelines.
- New software function: The series offers the ability to display the remaining time during measurement.
- New exterior design: The series features a sleek factory design with black and silver tones.
For more information contact:
Nikon Metrology, Inc.
12701 Grand River Ave.
Brighton, MI 48116
810-220-4360
sales.nm-us@nikon.com
www.nikonmetrology.com
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